FREIN FCPL 54 IP44 180Nm，180VDC A0.

FBB Automation，C0R008CC042，LS-SCBAC-025

编码器：Kubler，Type:8.5820M.0H10.1024.0010，5

9602.0014.10.00 Option Extractive Module

9602-7800 MST Sensor TMP 0-30.0 ppm

9602-7510 MST Sensor TMB 0-500 ppm

9602-7500 MST Sensor TEOS 0-100 ppm

9602-5900 MST Sensor SO2 0-25.0 ppm

9602-6301 MST Sensor SiH4 0-50.0 ppm

9602-9710 MST Sensor SF6 0-0.500 %-vol

9602-6102 MST Sensor PH3 0-1.00 ppm 3El

9602-6100 MST Sensor PH3 0-1.00 ppm 2El

9602-7101 MST Sensor O3 0-1.00 ppm

9602-7100 MST Sensor O3 0-1.00 ppm

9602-5500 MST Sensor O2 0-25.0 %-vol

9602-7200 MST Sensor NO 0-250 ppm

9602-6705 MST Sensor NH3 0-1000 ppm

9602-6704 MST Sensor NH3 0-100 ppm Versi

9602-9700 MST Sensor NF3 0-50.0 ppm

9602-7600 MST Sensor N2H4 0-1.00

9602-6714 MST Sensor HMDS 0-500

9602-6715 MST Sensor HMDS 0-0.500 %-vol

9602-6500 MST Sensor HF 0-10.0

9602-5700 MST Sensor HCN 0-30.0