1.3.9 电源模件
每个Tricon机架有二个电源模件，以双重冗余方式工作。每个电源能独立承担机架中所有模件的供电，每个电源在机架的背面装有独立的电源导轨。并有内部的诊断电路用以检查电压的输出范围和超温条件。每个模件从背板上获取电源，每个分电路都配有两个独立的电压调整器，分电路短路吸能影响这个分电路的电源调整器，而不影响整个电源总路线（见图1-5）。
图1-5 电源模件子系统的结构
图中：1、#1电源模件 2、桥式整流器 3、#2电源模件 4、NO—常开，NC—常闭，C—公共 5、报警 6、地 7、电压轨1，电压轨2 8、各个模件
1.3.10 系统诊断与状态指示灯
Tricon具有全面的在线诊断能力。故障监控电路可以预先检测出可能发生的故障，此电路包括有I/O回路检测、事故自动制动定时器、电源丢失检测器等部件，以及更多。这使得Tricon可以自行重新配置并根据各个模件和分电路的工作情况进行一定限度的自我修理。
每个Tricon模件都可激发系统的“完整”的报警。报警包括每个电源模件上的一对NC/NO继电器触点。任何故障时，包括系统电源的中断或“保险烧断”都可使激发报警动作，从而提醒工厂的维护人员。
每个模件的前面板上都有指示器（LED）。它们指示出模件的状态或者可能与之相连接的外部系统的状态。通常显示的状态为PASS（通过）、FAULT（故障）和ACTIVE（工作）。别的指示器依模件而不同。
维护工作包括更换插入式的各模件。点亮了的故障指示器表示在该模件上发现有故障，必须更换。指示器的控制电路和三条支路的每一条都是隔离的，而且是冗余的。
所有的内部诊断和报警状态数据可用于远程记录和报告的形成。这个报告工作通过当地的或远程的TriStation进行，或者通过一台主计算机。进一步资料可查阅“1131开发指南”。
KLA TENCOR 2131 WAFER DEFECT INSPECTION SYSTEM
KLA-Tencor Surfscan 6220 Inspection Tool AS-IS
KLA Tencor PN: 710-806051-01 rev.AO DP Board
KLA-Tencor AIT 200mm Wafer Inspection System 8020
KLA Tencor P-1 Long-Scan Surface Profiler
KLA-Tencor Prometrix FT-600 Film Thickness Measurement
KLA Tencor 4-Channel PWM Motor Drive 098140 REV D
KLA-TENCOR SURFSCAN 6420 USED
KLA-TENCOR PCB, MOTOR 12HGA11J52 CONTROL 112976
KLA Tencor Surfscan 4500
Wyko Veeco NT2000 Optical Profiler Zygo KLA Tencor
KLA-TENCOR SCINTILLATOR, 1700 107-009
KLA Tencor 7700M 4 Channel Motor Control 184586 REV B
KLA TENCOR XYI ASSY 710-610391-000/?AB SN P841002056 REV
KLA-Tencor Commtech RS-232 Board 232/8-ISA 00160502-000
KLA TENCOR Surfscan 6220 Unpatterned Surface Inspection
KLA Tencor Image Processor Board PN: 770-809195-000
KLA Tencor 2131 2132 2552 Defect Wafer Inspection Sys
KLA-Tencor Prometrix FT-750 Film Thickness Measurement
KLA TENCOR IMAGE PROCESS BOARD,VME,710-8?06050-01 REV.D2
KLA Tencor PN: 710-806050-01 12HGA11J52 rev D2 CAMERA Board
KLA Tencor Prog. Spatial Filter Assy 199931 REV C
KLA TENCOR FELL PROBE HEAD TYPE C 50-0002-03
KLA Tencor 7700M Flat Finder Controller 264865 REV A
KLA-Tencor 30-0070 Techsol Mini Environment 016-98 Used
KLA-TENCOR PCB, I/O MECHANICAL 54-0049 36-0194
KLA Tencor 7700M I/O Memory Universal Handler 172502
KLA Tencor PFE 4K Mask SFS7500 ASSY 213780 REV D
KLA-Tencor 168807 JDS U Laser Power Supply 2114B-30SLT
KLA Tencor Sensor Buffer Board 710-710199-01
KLA-Tencor HRP-340 Motor Interface Board 303737 working
KLA Tencor Vacuum Driver/Sensor 181137 REV B
KLA-Tencor NEAT CRS1010 12HGA11J52 200mm Wafer Stage Controller
KLA Tencor 710-711754-00 Autofocus Board
KLA-Tencor AIT 2 4-Channel Motor Control Board 363251
KLA-Tencor 50M Mirror 150mm x 25mm x 8mm 29-0383 New
KLA-Tencor RS100 Equipe Robot End Effector working
KLA-Tencor 200mm Finger Fork 0000824-002 Untested
KLA TENCOR IMAGE PROCESSOR,200Mh?z,VME,770-80919?5-000
KLA Tencor 7700M 156256 REV C CXT100A Diversified
PRI KLA-Tencor Robot Track TRA035-LPS working
JDS Uniphase 2214-30SLQTA Laser, KLA-Tencor 0105128-000
KLA-Tencor CRS 3000 300MM COMPLETE SYSTEM
KLA Tencor 710-710112-01 12HGA11J52 Mechanical Drive Board
Aerotech KLA-Tencor Aerotech DR 500 Controller 510432
KLA Tencor X/Y Interface 710-720011-01 Rev B6
KLA Tencor Illumination Control 710-713250-01
KLA Tencor Inductive Proximity Switch 730-450573-00
KLA Tencor Cassette Controller Board 710-711879-01
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA TENCOR,710-8060?51-01 REV.A0 VME BOARD
KLA-Tencor Yaskawa End Effector 0077427-002 untested
KLA-Tencor Power Supply 18-122516 Astec LPS254
KLA Tencor 710-711567-00 Communication interface II
KLA Tencor 2135 CMP Wafer Inspection Robot Loader Assy
KLA-Tencor SP1 TBI Ellipsoid 12HGA11J52 Collector 393541 New
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor Extender Card 710-711345-00
KLA-Tencor CRS1010 Vibration Isolator Set working
KLA TENCOR CARTRIDGE, SM300 SPECTRAMAP 50-0057
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA-Tencor Dalton TDI Inspection Camera 750-061019-00
KLA-Tencor 200/300mm Platen Assy. 0082238-000 working
Sony KLA-Tencor AIT 2 PowerHAD Camera DXC-950 363170
KLA-Tencor AIT 2 4-Channel Motor Control 261408 working
KLA TENCOR IMAGE DATA STORAGE SYSTEM 710-612545-004/?AA
KLA-Tencor GSI Lumonics X-Y 12HGA11J52 Scanner PCB CCA-10069 Pair
KLA-Tencor MO-76A Pulizzi Power Dist. Unit PC2425 Used
KLA-Tencor High Voltage Control Module 52-1081
KLA-Tencor AIT 2 GPIO Board 386065 working
KLA-Tencor AIT 2 MMD Analog Board 565040 working
KLA Tencor Ultrapointe Laser Imaging System LIS-1010
KLA/Tencor/Toky?o Electron VIP Card Board TEL
KLA Tencor Camera Timer 710-714647-00
GSI Lumonics KLA-Tencor Quantox Board CCA-10069
KLA-Tencor Dalsa CCD Camera 750-061019-00 untested
KLA-Tencor AIT 2 U500 Control Board 690D1470 working
KLA-Tencor Quantox High 12HGA11J52 Voltage Control Module 52-1081
KLA-Tencor AIT 2 Upper Opto-Mech NNC 0024755-001
KLA TENCOR DIGITAL DEFLECTION GENERATOR 701-603180-003
KLA-Tencor CRS2000 Olympus Microscope Turret BH3-5NRE-M
KLA-Tencor M2/M3 Servo Controller PCB 0038746-001 Used
KLA-Tencor X-Y Scanner PWA PCB E11-13209-7 Rev D
KLA-Tencor XP Objective Lens 0110155-000 Untested
KLA-Tencor HPR-340 U-Joint Board 454788 working
KLA-Tencor 486i Controller 0020839 Rev.AA working
KLA-Tencor Quantox Head 12HGA11J52 Control Module 64020 working
KLA-Tencor Spring Clamp Laser Servo Detect. 0124592-000
KLA-Tencor Marway 230V Power Strip 0046059-000 New
KLA-Tencor SM300 Monochromator 58-0834
KLA-Tencor AIT Upper Opto-Mech 0024755-000 working
KLA-Tencor Computer Interface Board 307793 working
KLA-Tencor F5X Disp Analyzer 0105208-000 Untested
KLA-Tencor AIT 2 MMD Analog Board 565040 working
