日本产业技术综合研究所(产综研)开发出了可集成于半导体芯片的微型热电式氢气 传感器 。检测范围(空气中氢气的浓度)达到了0.5ppm～5%之间。用于氢气站等设施的泄露检测。今后将向有关机构提供传感器样品，力争将其应用于氢气设施中。
该 传感器 在热电转换式MEMS元件上形成了以陶瓷支撑材料的铂触媒图案。与过去的传感器相比，更能发挥铂触媒的性能，因而具有良好的灵敏度和耐用性。
因为空气中氢的浓度一旦达4%，就会爆炸，因此氢气泄露检测技术需要氢气传感器能够在ppm级到4%这一最低爆炸极限浓度范围之间进行高精度检测。但是，以前的接触燃烧式和半导体式氢气传感器很难在ppm到百分之几的大范围内进行检测。
例如，接触燃烧式气体传感器依靠检测信号传感器的电阻变化进行检测，因此对高浓度区的检测比较有效，但在低浓度区由于灵敏度低，实际上根本无法检测。具体来说，燃烧发热导致温度变化0.01℃时，电阻变化仅为0.004%，实际上无法检测，因此不能当作传感器使用。
新开发的热电式氢气传感器由热电转换膜及其表面上部分形成的铂触媒膜组成，氢与触媒的发热反应引起的局部温差，利用热电转换膜转换为电压信号。因而，只要使用高性能的热电材料就可得到足以完成检测任务的信号。
新开发的传感器采用的是催化反应和热电转换功能相结合的工作原理，将元件本身产生的电压转换成信号，不仅提高了可检测浓度范围，还不易受到外界温度的影响。采用这种工作原理的氢气传感器在NEDO(新能源产业技术综合开发机构)开展的产业技术研究扶持项目--“采用热电氧化物的新型氢气传感器的开发”中已经开发成功，但要想开发出低成本、高灵敏度的传感器，还需要为传感器元件开发小型化与集成技术，以及微加热器技术。
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