产品描述：
LAM 810-800082-029 是一款用于半导体制造设备的控制模块。它由 LAM Research 生产，用于控制各种半导体制造工艺，包括蚀刻、沉积、光刻和离子注入。
功能
规格
应用
优势
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| IC697ALG320 | PM150V08 | 140ACI03000 | FBM243 |
| IC697ALG320 | PM253V01 | 140ACI04000 | FBM246 |
| IC697ALG320 | PM510 | 140ACO02000 | FBM25 |
| IC697ALG320 | PM510V08 | 140ARI03010 | FBM26 |
| IC697ALG320 | PM510V16 | 140AVI03000 | FBM26 DM900HU |
| IC697AL G440 | PM511V08 | 140CHS11000 | FBM27 |
| IC697BEM711 | PM511V16 | 140CPS11400 | FBM27 DM900NY |
| IC697BEM711 | PM581 | 140CPS11410 | FBM3 |
| IC697BEM713 | PM632 | 140CPS12400R | FBM39 |
| IC697BEM731 | PM645A | 140CPS12420 | FBM39 P0902UT |
| IC697BEM731 | PM645B | 140CPS21400 | FBM4 |
| IC697BEM731 | PM810 | 140CPU11303 | FBM41 |
| IC697BME731 | PM810V2 | 140CPU65150 | FBM41 XA |
| IC697CHS770 | PM825 | 140CRA21210 | FBM41C |
| IC697CHS790 | PU410 | 140CRP93200 | FBM41C P0902XA |
| IC697CHS790D | PU412 | 140DAI54000 | FBM41XA |
| IC697CMM742 | PU512V1 | 140DAI55300 | FBM42 |
| IC697CMM742 | PU512V2 | 140DAO84000 | FBM42 XB |
| IC697CPM790 | PU514 | 140DAO84210 | FBM42C |
| IC697CPM790-GD | PU514A | 140DDI35300 | FBM42C P0902XB |
| IC697CPM925 | PU515 | 140DDI35310 | FBM42XB |
| IC697CPM925 | PU515A | 140DRA84000 | FBM43 |
| IC697CPX772 | PU516 | 140DRC83000 | FBM44 |
| IC697CPX772 | PU516A | 140EHC10500 | FBM44 P0950BN |
| IC697CPX928 | PU518 | 140EHC20200 | FBM46 |
| IC697CPX928 | PU519 | 140HLI34000 | FBM5 |
| IC697CPX928-CD | PU515 3BSE013063R1 | 140MSB10100 | FBM7 |
| IC697CPX928-FE | PROFIBUS FI830F/3BDH000032R1 | 140NOE77111 | FBM9C |
| IC697CPX928-FE | 普罗康CS 31 CS31/ICSE08B5 | 140NOM21100 | FBMSSW |
| IC697CPX935 | PR9268/301-000 | 140NRP31200C | FBMSVH |
| IC697CPX935 | PP C905 AE101 3BHE014070R0101 . | 140CRP31200C | FBP10 |
| IC697CPX935 | PM866K01/PM866K02 | 140NRP95400 | FBPCB-0076 |
| IC697HSC700 | PM866K01 | 140NRP95401C | FCM100E |
| DS200SDCCG3A | PM866A | 140SDI95300S | FCM100E P0972ZA |
| DS200SLCCF1ADA | 3BSE076359R1 | 140SDO95300S | FBM237-P0917QZ |
| DS200SIOCG1A | PM865K01 3BSE031151R1 | 140XBE10000 | FBM239 P0927AG |
| DS200STBAG1A | PM864AK01 3BSE018161R1 | 140XCP51000 | FBM24 |
| DS200SHVIG1A | PM861AK01 PM861AK02 | 170AAO92100 170INT11003 | FBM240 |
| DS200SSBCG1A | PM861AK01 3BSE018157R1 | 416NHM30030 | FBM241 |
| DS200SLCCG4AFG | GJR5253100R0272 07KT98-ETH-DP | 416NHM30030A | FBM241 P0914WM |
