ShimadzuTMP-3203LM/TMP-3203LMC分子泵进气法兰口ISO320-F,出气法兰口KF40,抽速可达到3200L/s,转速为21000rpm,极限压力1x10-9Torr(1.3x10-9mbar),岛津TMP-3203LMC磁悬浮分子泵对应的控制器为:ShimadzuEI-3203MD,ShimadzuEI-R04M等