Varian TASK-V70LP pump system紧凑型分子泵系统是由瓦里安Turbo-V70LP涡轮分子泵和SD40前级真空泵组成,进气法兰口DN40 ISO-K/DN40 CF-F/DN63 ISO-K/DN63 CF-F,抽速可达到45 L/s-68 L/s,真空度1X10-9 mbar.瓦里安TV70LP高速涡轮泵保养, Varian Turbo Pumping Systems分子泵机组维修