Varian Turbo-V902瓦里安涡轮分子泵维修,Varian Turbo-V902瓦里安涡轮分子泵进气法兰口ISO100,出气法兰口KF25,抽速可达到680 L/s,转速为38000rpm,对应的控制器为:Varian Turbo-V902